Lesson plan

Feature-oriented scanning

Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a scanning probe microscope in which surface features (objects) are used as reference points for microscope probe attachment. With FOS method, by passing from one surface feature to another located nearby, the relative distance between the features and the feature neighborhood topographies are measured. This approach allows to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments. Beside the mentioned, it is acceptable to use another name for the method – object-oriented scanning (OOS). __TOC__

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Article summary

Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a scanning probe microscope in which surface features (objects) are used as reference points for microscope probe attachment. With FOS method, by passing from one surface feature to another located nearby, the relative distance between the features and the feature neighborhood topographies are measured. This approach allows to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments. Beside the mentioned, it is acceptable to use another name for the method – object-oriented scanning (OOS). __TOC__

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  1. Summarise the article in your own words. Which single claim would you verify first, and why?
  2. Which claim in this article is most likely to be revised as the sources update? How would you check its current status?
  3. If two sources disagreed about one of these facts, what would you need in order to trust one over the other?

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